1 Introduction to Research & Analysis Reports
1.1 Photoresist Ashing Equipment Market Definition
1.2 Market Segments
1.2.1 Market by Type
1.2.2 Market by Application
1.3 Global Photoresist Ashing Equipment Market Overview
1.4 Features & Benefits of This Report
1.5 Methodology & Sources of Information
1.5.1 Research Methodology
1.5.2 Research Process
1.5.3 Base Year
1.5.4 Report Assumptions & Caveats
2 Global Photoresist Ashing Equipment Overall Market Size
2.1 Global Photoresist Ashing Equipment Market Size: 2022 VS 2029
2.2 Global Photoresist Ashing Equipment Revenue, Prospects & Forecasts: 2018-2029
2.3 Global Photoresist Ashing Equipment Sales: 2018-2029
3 Company Landscape
3.1 Top Photoresist Ashing Equipment Players in Global Market
3.2 Top Global Photoresist Ashing Equipment Companies Ranked by Revenue
3.3 Global Photoresist Ashing Equipment Revenue by Companies
3.4 Global Photoresist Ashing Equipment Sales by Companies
3.5 Global Photoresist Ashing Equipment Price by Manufacturer (2018-2023)
3.6 Top 3 and Top 5 Photoresist Ashing Equipment Companies in Global Market, by Revenue in 2022
3.7 Global Manufacturers Photoresist Ashing Equipment Product Type
3.8 Tier 1, Tier 2 and Tier 3 Photoresist Ashing Equipment Players in Global Market
3.8.1 List of Global Tier 1 Photoresist Ashing Equipment Companies
3.8.2 List of Global Tier 2 and Tier 3 Photoresist Ashing Equipment Companies
4 Sights by Product
4.1 Overview
4.1.1 By Type – Global Photoresist Ashing Equipment Market Size Markets, 2022 & 2029
4.1.2 Desktop
4.1.3 Floor-standing
4.2 By Type – Global Photoresist Ashing Equipment Revenue & Forecasts
4.2.1 By Type – Global Photoresist Ashing Equipment Revenue, 2018-2023
4.2.2 By Type – Global Photoresist Ashing Equipment Revenue, 2024-2029
4.2.3 By Type – Global Photoresist Ashing Equipment Revenue Market Share, 2018-2029
4.3 By Type – Global Photoresist Ashing Equipment Sales & Forecasts
4.3.1 By Type – Global Photoresist Ashing Equipment Sales, 2018-2023
4.3.2 By Type – Global Photoresist Ashing Equipment Sales, 2024-2029
4.3.3 By Type – Global Photoresist Ashing Equipment Sales Market Share, 2018-2029
4.4 By Type – Global Photoresist Ashing Equipment Price (Manufacturers Selling Prices), 2018-2029
5 Sights by Application
5.1 Overview
5.1.1 By Application – Global Photoresist Ashing Equipment Market Size, 2022 & 2029
5.1.2 IC
5.1.3 Advanced Packaging
5.1.4 MEMS
5.1.5 LED
5.2 By Application – Global Photoresist Ashing Equipment Revenue & Forecasts
5.2.1 By Application – Global Photoresist Ashing Equipment Revenue, 2018-2023
5.2.2 By Application – Global Photoresist Ashing Equipment Revenue, 2024-2029
5.2.3 By Application – Global Photoresist Ashing Equipment Revenue Market Share, 2018-2029
5.3 By Application – Global Photoresist Ashing Equipment Sales & Forecasts
5.3.1 By Application – Global Photoresist Ashing Equipment Sales, 2018-2023
5.3.2 By Application – Global Photoresist Ashing Equipment Sales, 2024-2029
5.3.3 By Application – Global Photoresist Ashing Equipment Sales Market Share, 2018-2029
5.4 By Application – Global Photoresist Ashing Equipment Price (Manufacturers Selling Prices), 2018-2029
6 Sights by Region
6.1 By Region – Global Photoresist Ashing Equipment Market Size, 2022 & 2029
6.2 By Region – Global Photoresist Ashing Equipment Revenue & Forecasts
6.2.1 By Region – Global Photoresist Ashing Equipment Revenue, 2018-2023
6.2.2 By Region – Global Photoresist Ashing Equipment Revenue, 2024-2029
6.2.3 By Region – Global Photoresist Ashing Equipment Revenue Market Share, 2018-2029
6.3 By Region – Global Photoresist Ashing Equipment Sales & Forecasts
6.3.1 By Region – Global Photoresist Ashing Equipment Sales, 2018-2023
6.3.2 By Region – Global Photoresist Ashing Equipment Sales, 2024-2029
6.3.3 By Region – Global Photoresist Ashing Equipment Sales Market Share, 2018-2029
6.4 North America
6.4.1 By Country – North America Photoresist Ashing Equipment Revenue, 2018-2029
6.4.2 By Country – North America Photoresist Ashing Equipment Sales, 2018-2029
6.4.3 US Photoresist Ashing Equipment Market Size, 2018-2029
6.4.4 Canada Photoresist Ashing Equipment Market Size, 2018-2029
6.4.5 Mexico Photoresist Ashing Equipment Market Size, 2018-2029
6.5 Europe
6.5.1 By Country – Europe Photoresist Ashing Equipment Revenue, 2018-2029
6.5.2 By Country – Europe Photoresist Ashing Equipment Sales, 2018-2029
6.5.3 Germany Photoresist Ashing Equipment Market Size, 2018-2029
6.5.4 France Photoresist Ashing Equipment Market Size, 2018-2029
6.5.5 U.K. Photoresist Ashing Equipment Market Size, 2018-2029
6.5.6 Italy Photoresist Ashing Equipment Market Size, 2018-2029
6.5.7 Russia Photoresist Ashing Equipment Market Size, 2018-2029
6.5.8 Nordic Countries Photoresist Ashing Equipment Market Size, 2018-2029
6.5.9 Benelux Photoresist Ashing Equipment Market Size, 2018-2029
6.6 Asia
6.6.1 By Region – Asia Photoresist Ashing Equipment Revenue, 2018-2029
6.6.2 By Region – Asia Photoresist Ashing Equipment Sales, 2018-2029
6.6.3 China Photoresist Ashing Equipment Market Size, 2018-2029
6.6.4 Japan Photoresist Ashing Equipment Market Size, 2018-2029
6.6.5 South Korea Photoresist Ashing Equipment Market Size, 2018-2029
6.6.6 Southeast Asia Photoresist Ashing Equipment Market Size, 2018-2029
6.6.7 India Photoresist Ashing Equipment Market Size, 2018-2029
6.7 South America
6.7.1 By Country – South America Photoresist Ashing Equipment Revenue, 2018-2029
6.7.2 By Country – South America Photoresist Ashing Equipment Sales, 2018-2029
6.7.3 Brazil Photoresist Ashing Equipment Market Size, 2018-2029
6.7.4 Argentina Photoresist Ashing Equipment Market Size, 2018-2029
6.8 Middle East & Africa
6.8.1 By Country – Middle East & Africa Photoresist Ashing Equipment Revenue, 2018-2029
6.8.2 By Country – Middle East & Africa Photoresist Ashing Equipment Sales, 2018-2029
6.8.3 Turkey Photoresist Ashing Equipment Market Size, 2018-2029
6.8.4 Israel Photoresist Ashing Equipment Market Size, 2018-2029
6.8.5 Saudi Arabia Photoresist Ashing Equipment Market Size, 2018-2029
6.8.6 UAE Photoresist Ashing Equipment Market Size, 2018-2029
7 Manufacturers & Brands Profiles
7.1 PVA TePla
7.1.1 PVA TePla Company Summary
7.1.2 PVA TePla Business Overview
7.1.3 PVA TePla Photoresist Ashing Equipment Major Product Offerings
7.1.4 PVA TePla Photoresist Ashing Equipment Sales and Revenue in Global (2018-2023)
7.1.5 PVA TePla Key News & Latest Developments
7.2 PIE Scientific
7.2.1 PIE Scientific Company Summary
7.2.2 PIE Scientific Business Overview
7.2.3 PIE Scientific Photoresist Ashing Equipment Major Product Offerings
7.2.4 PIE Scientific Photoresist Ashing Equipment Sales and Revenue in Global (2018-2023)
7.2.5 PIE Scientific Key News & Latest Developments
7.3 SAMCO INC.
7.3.1 SAMCO INC. Company Summary
7.3.2 SAMCO INC. Business Overview
7.3.3 SAMCO INC. Photoresist Ashing Equipment Major Product Offerings
7.3.4 SAMCO INC. Photoresist Ashing Equipment Sales and Revenue in Global (2018-2023)
7.3.5 SAMCO INC. Key News & Latest Developments
7.4 ESI
7.4.1 ESI Company Summary
7.4.2 ESI Business Overview
7.4.3 ESI Photoresist Ashing Equipment Major Product Offerings
7.4.4 ESI Photoresist Ashing Equipment Sales and Revenue in Global (2018-2023)
7.4.5 ESI Key News & Latest Developments
7.5 Diener electronic GmbH
7.5.1 Diener electronic GmbH Company Summary
7.5.2 Diener electronic GmbH Business Overview
7.5.3 Diener electronic GmbH Photoresist Ashing Equipment Major Product Offerings
7.5.4 Diener electronic GmbH Photoresist Ashing Equipment Sales and Revenue in Global (2018-2023)
7.5.5 Diener electronic GmbH Key News & Latest Developments
7.6 ULVAC
7.6.1 ULVAC Company Summary
7.6.2 ULVAC Business Overview
7.6.3 ULVAC Photoresist Ashing Equipment Major Product Offerings
7.6.4 ULVAC Photoresist Ashing Equipment Sales and Revenue in Global (2018-2023)
7.6.5 ULVAC Key News & Latest Developments
7.7 Trion Technology
7.7.1 Trion Technology Company Summary
7.7.2 Trion Technology Business Overview
7.7.3 Trion Technology Photoresist Ashing Equipment Major Product Offerings
7.7.4 Trion Technology Photoresist Ashing Equipment Sales and Revenue in Global (2018-2023)
7.7.5 Trion Technology Key News & Latest Developments
7.8 YAC HOLDINGS CO
7.8.1 YAC HOLDINGS CO Company Summary
7.8.2 YAC HOLDINGS CO Business Overview
7.8.3 YAC HOLDINGS CO Photoresist Ashing Equipment Major Product Offerings
7.8.4 YAC HOLDINGS CO Photoresist Ashing Equipment Sales and Revenue in Global (2018-2023)
7.8.5 YAC HOLDINGS CO Key News & Latest Developments
8 Global Photoresist Ashing Equipment Production Capacity, Analysis
8.1 Global Photoresist Ashing Equipment Production Capacity, 2018-2029
8.2 Photoresist Ashing Equipment Production Capacity of Key Manufacturers in Global Market
8.3 Global Photoresist Ashing Equipment Production by Region
9 Key Market Trends, Opportunity, Drivers and Restraints
9.1 Market Opportunities & Trends
9.2 Market Drivers
9.3 Market Restraints
10 Photoresist Ashing Equipment Supply Chain Analysis
10.1 Photoresist Ashing Equipment Industry Value Chain
10.2 Photoresist Ashing Equipment Upstream Market
10.3 Photoresist Ashing Equipment Downstream and Clients
10.4 Marketing Channels Analysis
10.4.1 Marketing Channels
10.4.2 Photoresist Ashing Equipment Distributors and Sales Agents in Global
11 Conclusion
12 Appendix
12.1 Note
12.2 Examples of Clients
12.3 Disclaimer
Table 1. Key Players of Photoresist Ashing Equipment in Global Market
Table 2. Top Photoresist Ashing Equipment Players in Global Market, Ranking by Revenue (2022)
Table 3. Global Photoresist Ashing Equipment Revenue by Companies, (US$, Mn), 2018-2023
Table 4. Global Photoresist Ashing Equipment Revenue Share by Companies, 2018-2023
Table 5. Global Photoresist Ashing Equipment Sales by Companies, (K Units), 2018-2023
Table 6. Global Photoresist Ashing Equipment Sales Share by Companies, 2018-2023
Table 7. Key Manufacturers Photoresist Ashing Equipment Price (2018-2023) & (US$/Unit)
Table 8. Global Manufacturers Photoresist Ashing Equipment Product Type
Table 9. List of Global Tier 1 Photoresist Ashing Equipment Companies, Revenue (US$, Mn) in 2022 and Market Share
Table 10. List of Global Tier 2 and Tier 3 Photoresist Ashing Equipment Companies, Revenue (US$, Mn) in 2022 and Market Share
Table 11. By Type – Global Photoresist Ashing Equipment Revenue, (US$, Mn), 2022 & 2029
Table 12. By Type - Global Photoresist Ashing Equipment Revenue (US$, Mn), 2018-2023
Table 13. By Type - Global Photoresist Ashing Equipment Revenue (US$, Mn), 2024-2029
Table 14. By Type - Global Photoresist Ashing Equipment Sales (K Units), 2018-2023
Table 15. By Type - Global Photoresist Ashing Equipment Sales (K Units), 2024-2029
Table 16. By Application – Global Photoresist Ashing Equipment Revenue, (US$, Mn), 2022 & 2029
Table 17. By Application - Global Photoresist Ashing Equipment Revenue (US$, Mn), 2018-2023
Table 18. By Application - Global Photoresist Ashing Equipment Revenue (US$, Mn), 2024-2029
Table 19. By Application - Global Photoresist Ashing Equipment Sales (K Units), 2018-2023
Table 20. By Application - Global Photoresist Ashing Equipment Sales (K Units), 2024-2029
Table 21. By Region – Global Photoresist Ashing Equipment Revenue, (US$, Mn), 2022 VS 2029
Table 22. By Region - Global Photoresist Ashing Equipment Revenue (US$, Mn), 2018-2023
Table 23. By Region - Global Photoresist Ashing Equipment Revenue (US$, Mn), 2024-2029
Table 24. By Region - Global Photoresist Ashing Equipment Sales (K Units), 2018-2023
Table 25. By Region - Global Photoresist Ashing Equipment Sales (K Units), 2024-2029
Table 26. By Country - North America Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2023
Table 27. By Country - North America Photoresist Ashing Equipment Revenue, (US$, Mn), 2024-2029
Table 28. By Country - North America Photoresist Ashing Equipment Sales, (K Units), 2018-2023
Table 29. By Country - North America Photoresist Ashing Equipment Sales, (K Units), 2024-2029
Table 30. By Country - Europe Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2023
Table 31. By Country - Europe Photoresist Ashing Equipment Revenue, (US$, Mn), 2024-2029
Table 32. By Country - Europe Photoresist Ashing Equipment Sales, (K Units), 2018-2023
Table 33. By Country - Europe Photoresist Ashing Equipment Sales, (K Units), 2024-2029
Table 34. By Region - Asia Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2023
Table 35. By Region - Asia Photoresist Ashing Equipment Revenue, (US$, Mn), 2024-2029
Table 36. By Region - Asia Photoresist Ashing Equipment Sales, (K Units), 2018-2023
Table 37. By Region - Asia Photoresist Ashing Equipment Sales, (K Units), 2024-2029
Table 38. By Country - South America Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2023
Table 39. By Country - South America Photoresist Ashing Equipment Revenue, (US$, Mn), 2024-2029
Table 40. By Country - South America Photoresist Ashing Equipment Sales, (K Units), 2018-2023
Table 41. By Country - South America Photoresist Ashing Equipment Sales, (K Units), 2024-2029
Table 42. By Country - Middle East & Africa Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2023
Table 43. By Country - Middle East & Africa Photoresist Ashing Equipment Revenue, (US$, Mn), 2024-2029
Table 44. By Country - Middle East & Africa Photoresist Ashing Equipment Sales, (K Units), 2018-2023
Table 45. By Country - Middle East & Africa Photoresist Ashing Equipment Sales, (K Units), 2024-2029
Table 46. PVA TePla Company Summary
Table 47. PVA TePla Photoresist Ashing Equipment Product Offerings
Table 48. PVA TePla Photoresist Ashing Equipment Sales (K Units), Revenue (US$, Mn) and Average Price (US$/Unit) (2018-2023)
Table 49. PVA TePla Key News & Latest Developments
Table 50. PIE Scientific Company Summary
Table 51. PIE Scientific Photoresist Ashing Equipment Product Offerings
Table 52. PIE Scientific Photoresist Ashing Equipment Sales (K Units), Revenue (US$, Mn) and Average Price (US$/Unit) (2018-2023)
Table 53. PIE Scientific Key News & Latest Developments
Table 54. SAMCO INC. Company Summary
Table 55. SAMCO INC. Photoresist Ashing Equipment Product Offerings
Table 56. SAMCO INC. Photoresist Ashing Equipment Sales (K Units), Revenue (US$, Mn) and Average Price (US$/Unit) (2018-2023)
Table 57. SAMCO INC. Key News & Latest Developments
Table 58. ESI Company Summary
Table 59. ESI Photoresist Ashing Equipment Product Offerings
Table 60. ESI Photoresist Ashing Equipment Sales (K Units), Revenue (US$, Mn) and Average Price (US$/Unit) (2018-2023)
Table 61. ESI Key News & Latest Developments
Table 62. Diener electronic GmbH Company Summary
Table 63. Diener electronic GmbH Photoresist Ashing Equipment Product Offerings
Table 64. Diener electronic GmbH Photoresist Ashing Equipment Sales (K Units), Revenue (US$, Mn) and Average Price (US$/Unit) (2018-2023)
Table 65. Diener electronic GmbH Key News & Latest Developments
Table 66. ULVAC Company Summary
Table 67. ULVAC Photoresist Ashing Equipment Product Offerings
Table 68. ULVAC Photoresist Ashing Equipment Sales (K Units), Revenue (US$, Mn) and Average Price (US$/Unit) (2018-2023)
Table 69. ULVAC Key News & Latest Developments
Table 70. Trion Technology Company Summary
Table 71. Trion Technology Photoresist Ashing Equipment Product Offerings
Table 72. Trion Technology Photoresist Ashing Equipment Sales (K Units), Revenue (US$, Mn) and Average Price (US$/Unit) (2018-2023)
Table 73. Trion Technology Key News & Latest Developments
Table 74. YAC HOLDINGS CO Company Summary
Table 75. YAC HOLDINGS CO Photoresist Ashing Equipment Product Offerings
Table 76. YAC HOLDINGS CO Photoresist Ashing Equipment Sales (K Units), Revenue (US$, Mn) and Average Price (US$/Unit) (2018-2023)
Table 77. YAC HOLDINGS CO Key News & Latest Developments
Table 78. Photoresist Ashing Equipment Production Capacity (K Units) of Key Manufacturers in Global Market, 2021-2023 (K Units)
Table 79. Global Photoresist Ashing Equipment Capacity Market Share of Key Manufacturers, 2021-2023
Table 80. Global Photoresist Ashing Equipment Production by Region, 2018-2023 (K Units)
Table 81. Global Photoresist Ashing Equipment Production by Region, 2024-2029 (K Units)
Table 82. Photoresist Ashing Equipment Market Opportunities & Trends in Global Market
Table 83. Photoresist Ashing Equipment Market Drivers in Global Market
Table 84. Photoresist Ashing Equipment Market Restraints in Global Market
Table 85. Photoresist Ashing Equipment Raw Materials
Table 86. Photoresist Ashing Equipment Raw Materials Suppliers in Global Market
Table 87. Typical Photoresist Ashing Equipment Downstream
Table 88. Photoresist Ashing Equipment Downstream Clients in Global Market
Table 89. Photoresist Ashing Equipment Distributors and Sales Agents in Global Market
List of Figures
Figure 1. Photoresist Ashing Equipment Segment by Type in 2022
Figure 2. Photoresist Ashing Equipment Segment by Application in 2022
Figure 3. Global Photoresist Ashing Equipment Market Overview: 2022
Figure 4. Key Caveats
Figure 5. Global Photoresist Ashing Equipment Market Size: 2022 VS 2029 (US$, Mn)
Figure 6. Global Photoresist Ashing Equipment Revenue, 2018-2029 (US$, Mn)
Figure 7. Photoresist Ashing Equipment Sales in Global Market: 2018-2029 (K Units)
Figure 8. The Top 3 and 5 Players Market Share by Photoresist Ashing Equipment Revenue in 2022
Figure 9. By Type - Global Photoresist Ashing Equipment Revenue, (US$, Mn), 2022 & 2029
Figure 10. By Type - Global Photoresist Ashing Equipment Revenue Market Share, 2018-2029
Figure 11. By Type - Global Photoresist Ashing Equipment Sales Market Share, 2018-2029
Figure 12. By Type - Global Photoresist Ashing Equipment Price (US$/Unit), 2018-2029
Figure 13. By Application - Global Photoresist Ashing Equipment Revenue, (US$, Mn), 2022 & 2029
Figure 14. By Application - Global Photoresist Ashing Equipment Revenue Market Share, 2018-2029
Figure 15. By Application - Global Photoresist Ashing Equipment Sales Market Share, 2018-2029
Figure 16. By Application - Global Photoresist Ashing Equipment Price (US$/Unit), 2018-2029
Figure 17. By Region - Global Photoresist Ashing Equipment Revenue, (US$, Mn), 2022 & 2029
Figure 18. By Region - Global Photoresist Ashing Equipment Revenue Market Share, 2018 VS 2022 VS 2029
Figure 19. By Region - Global Photoresist Ashing Equipment Revenue Market Share, 2018-2029
Figure 20. By Region - Global Photoresist Ashing Equipment Sales Market Share, 2018-2029
Figure 21. By Country - North America Photoresist Ashing Equipment Revenue Market Share, 2018-2029
Figure 22. By Country - North America Photoresist Ashing Equipment Sales Market Share, 2018-2029
Figure 23. US Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 24. Canada Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 25. Mexico Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 26. By Country - Europe Photoresist Ashing Equipment Revenue Market Share, 2018-2029
Figure 27. By Country - Europe Photoresist Ashing Equipment Sales Market Share, 2018-2029
Figure 28. Germany Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 29. France Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 30. U.K. Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 31. Italy Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 32. Russia Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 33. Nordic Countries Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 34. Benelux Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 35. By Region - Asia Photoresist Ashing Equipment Revenue Market Share, 2018-2029
Figure 36. By Region - Asia Photoresist Ashing Equipment Sales Market Share, 2018-2029
Figure 37. China Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 38. Japan Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 39. South Korea Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 40. Southeast Asia Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 41. India Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 42. By Country - South America Photoresist Ashing Equipment Revenue Market Share, 2018-2029
Figure 43. By Country - South America Photoresist Ashing Equipment Sales Market Share, 2018-2029
Figure 44. Brazil Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 45. Argentina Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 46. By Country - Middle East & Africa Photoresist Ashing Equipment Revenue Market Share, 2018-2029
Figure 47. By Country - Middle East & Africa Photoresist Ashing Equipment Sales Market Share, 2018-2029
Figure 48. Turkey Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 49. Israel Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 50. Saudi Arabia Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 51. UAE Photoresist Ashing Equipment Revenue, (US$, Mn), 2018-2029
Figure 52. Global Photoresist Ashing Equipment Production Capacity (K Units), 2018-2029
Figure 53. The Percentage of Production Photoresist Ashing Equipment by Region, 2022 VS 2029
Figure 54. Photoresist Ashing Equipment Industry Value Chain
Figure 55. Marketing Channels
※参考情報 フォトレジストアッシング装置は、半導体製造プロセスにおいて重要な役割を果たす装置であり、エッチングやクリーニングの工程で使用されます。フォトレジストとは、半導体チップの製造においてパターン形成に利用される感光性の材料です。フォトレジストアッシング装置は、このフォトレジストを焼き切る、つまりアッシングを行うための設備です。アッシングとは、高エネルギーのプラズマを利用してフォトレジストを化学的に分解し、除去するプロセスです。 フォトレジストアッシング装置の主な特徴は、その高い効率性と精度です。プラズマアッシングによって、フォトレジストを高温下でも残留物を最小限に抑えつつ除去することができるため、次の工程への影響を軽減します。また、この装置はプロセスの自動化が進んでおり、安定した生産性を保つために必要な条件を管理することが可能です。時には生成されたガスやエッセンシャルオイルが環境に与える影響を考慮し、排出管理技術も進化しています。 フォトレジストアッシング装置にはいくつかの種類があります。大きく分けると、ダウンストリームプラズマアッシングとアップストリームプラズマアッシングの二つに分類されます。ダウンストリームアッシングは、プラズマが生成された後、そのプラズマが基板に達するまでの間にいくつかの気体を導入し、化学反応を促す方法です。一方で、アップストリームアッシングは、プラズマが直接基板に到達する手法で、特定の材料に対して高い選択性を持つことが特徴です。 この二種類のアッシング方法は、それぞれに適した用途があります。例えば、高解像度のパターンを形成するための微細加工ではダウンストリームアッシングがよく用いられます。逆に、比較的粗いパターンであれば、アップストリームアッシングを適用することが一般的です。プロセス条件やマテリアル特性に応じて、最適なアッシング方法を選定することが成功の鍵と言えるでしょう。 フォトレジストアッシング装置の用途としては、主に半導体デバイスの製造過程が挙げられます。具体的には、フォトリソグラフィープロセスの後に残るフォトレジストを除去することが主な役割です。これにより、基板上に形成されたパターンが露出し、デバイスの製造が進行します。さらに、MEMS(Micro-Electro-Mechanical Systems)や光学デバイス、太陽電池など、さまざまな先端技術の製造においてもこの装置は使用されています。 関連技術としては、プラズマ生成技術やガス供給制御技術、そしてプロセス監視システムなどが考えられます。特に、プラズマ生成技術は、その出力や均一性、安定性がアッシングプロセスの結果を大きく左右します。また、ガス供給制御技術は、使用するガスの選択と流量調整により、反応性や副産物の生成を適切にコントロールする役割を担っています。プロセス監視システムは、アッシングの進行状況をリアルタイムで監視し、異常を事前に検知することで、品質を保持するための重要な機能を提供します。 フォトレジストアッシング装置は、半導体産業における品質向上と生産コストの削減に寄与しており、日々進化を遂げています。高周波プラズマ技術を利用することで、さらなる微細化を実現しつつ、効率的にフォトレジストを除去することが求められています。特に、次世代の半導体製品に対応するため、さらなる技術革新や改良が進められることでしょう。未来の半導体製造は、より高性能でありながら環境にも配慮したプロセスが求められています。このような背景を踏まえて、フォトレジストアッシング装置はその中心的な存在であり続けることが期待されます。 |
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