1 Executive Summary
2 Preface
2.1 Abstract
2.2 Stake Holders
2.3 Research Scope
2.4 Research Methodology
2.4.1 Data Mining
2.4.2 Data Analysis
2.4.3 Data Validation
2.4.4 Research Approach
2.5 Research Sources
2.5.1 Primary Research Sources
2.5.2 Secondary Research Sources
2.5.3 Assumptions
3 Market Trend Analysis
3.1 Introduction
3.2 Drivers
3.3 Restraints
3.4 Opportunities
3.5 Threats
3.6 Application Analysis
3.7 End User Analysis
3.8 Emerging Markets
3.9 Impact of Covid-19
4 Porters Five Force Analysis
4.1 Bargaining power of suppliers
4.2 Bargaining power of buyers
4.3 Threat of substitutes
4.4 Threat of new entrants
4.5 Competitive rivalry
5 Global Remote Plasma Source Market, By Type
5.1 Introduction
5.2 Remote Plasma Cleaner
5.3 Remote Plasma Processor
5.4 Capacitively Coupled Plasma (CCP)
5.5 Inductively Coupled Plasma (ICP)
5.6 Remote Microwave Plasma
5.7 Other Types
6 Global Remote Plasma Source Market, By Application
6.1 Introduction
6.2 Semiconductor Manufacturing
6.3 Thin Film Deposition
6.4 Surface Treatment
6.5 CVD (Chemical Vapor Deposition)
6.6 ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition)
6.7 Etch
6.8 Other Applications
7 Global Remote Plasma Source Market, By End User
7.1 Introduction
7.2 Electronics & Semiconductor Industry
7.3 Healthcare Industry
7.4 Manufacturing Industry
7.5 Optics
7.6 Textile Industry
7.7 Chemical
7.8 Other End Users
8 Global Remote Plasma Source Market, By Geography
8.1 Introduction
8.2 North America
8.2.1 US
8.2.2 Canada
8.2.3 Mexico
8.3 Europe
8.3.1 Germany
8.3.2 UK
8.3.3 Italy
8.3.4 France
8.3.5 Spain
8.3.6 Rest of Europe
8.4 Asia Pacific
8.4.1 Japan
8.4.2 China
8.4.3 India
8.4.4 Australia
8.4.5 New Zealand
8.4.6 South Korea
8.4.7 Rest of Asia Pacific
8.5 South America
8.5.1 Argentina
8.5.2 Brazil
8.5.3 Chile
8.5.4 Rest of South America
8.6 Middle East & Africa
8.6.1 Saudi Arabia
8.6.2 UAE
8.6.3 Qatar
8.6.4 South Africa
8.6.5 Rest of Middle East & Africa
9 Key Developments
9.1 Agreements, Partnerships, Collaborations and Joint Ventures
9.2 Acquisitions & Mergers
9.3 New Product Launch
9.4 Expansions
9.5 Other Key Strategies
10 Company Profiling
10.1 T-M Vacuum Products, Inc.
10.2 Lam Research Corporation
10.3 Sentech Instruments GmbH
10.4 Advanced Energy Industries, Inc.
10.5 Plasma Etch, Inc.
10.6 Muegge GmbH
10.7 PIE Scientific LLC.
10.8 ADTEC Plasma Technology Co., Ltd.
10.9 Rave Scientific
10.10 PVA TePla AG
10.11 MKS Instruments.
10.12 Samco Inc.
10.13 Oxford Instruments plc
10.14 XEI Scientific, Inc.
List of Tables
Table 1 Global Remote Plasma Source Market Outlook, By Region (2021-2030) ($MN)
Table 2 Global Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 3 Global Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 4 Global Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 5 Global Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 6 Global Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 7 Global Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 8 Global Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 9 Global Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 10 Global Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 11 Global Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 12 Global Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 13 Global Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 14 Global Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 15 Global Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 16 Global Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 17 Global Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 18 Global Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 19 Global Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 20 Global Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 21 Global Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 22 Global Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 23 Global Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 24 Global Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 25 North America Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 26 North America Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 27 North America Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 28 North America Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 29 North America Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 30 North America Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 31 North America Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 32 North America Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 33 North America Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 34 North America Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 35 North America Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 36 North America Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 37 North America Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 38 North America Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 39 North America Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 40 North America Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 41 North America Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 42 North America Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 43 North America Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 44 North America Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 45 North America Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 46 North America Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 47 North America Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 48 North America Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 49 Europe Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 50 Europe Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 51 Europe Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 52 Europe Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 53 Europe Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 54 Europe Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 55 Europe Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 56 Europe Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 57 Europe Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 58 Europe Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 59 Europe Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 60 Europe Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 61 Europe Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 62 Europe Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 63 Europe Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 64 Europe Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 65 Europe Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 66 Europe Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 67 Europe Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 68 Europe Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 69 Europe Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 70 Europe Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 71 Europe Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 72 Europe Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 73 Asia Pacific Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 74 Asia Pacific Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 75 Asia Pacific Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 76 Asia Pacific Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 77 Asia Pacific Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 78 Asia Pacific Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 79 Asia Pacific Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 80 Asia Pacific Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 81 Asia Pacific Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 82 Asia Pacific Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 83 Asia Pacific Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 84 Asia Pacific Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 85 Asia Pacific Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 86 Asia Pacific Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 87 Asia Pacific Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 88 Asia Pacific Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 89 Asia Pacific Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 90 Asia Pacific Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 91 Asia Pacific Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 92 Asia Pacific Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 93 Asia Pacific Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 94 Asia Pacific Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 95 Asia Pacific Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 96 Asia Pacific Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 97 South America Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 98 South America Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 99 South America Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 100 South America Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 101 South America Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 102 South America Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 103 South America Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 104 South America Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 105 South America Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 106 South America Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 107 South America Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 108 South America Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 109 South America Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 110 South America Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 111 South America Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 112 South America Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 113 South America Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 114 South America Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 115 South America Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 116 South America Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 117 South America Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 118 South America Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 119 South America Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 120 South America Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 121 Middle East & Africa Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 122 Middle East & Africa Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 123 Middle East & Africa Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 124 Middle East & Africa Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 125 Middle East & Africa Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 126 Middle East & Africa Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 127 Middle East & Africa Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 128 Middle East & Africa Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 129 Middle East & Africa Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 130 Middle East & Africa Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 131 Middle East & Africa Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 132 Middle East & Africa Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 133 Middle East & Africa Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 134 Middle East & Africa Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 135 Middle East & Africa Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 136 Middle East & Africa Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 137 Middle East & Africa Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 138 Middle East & Africa Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 139 Middle East & Africa Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 140 Middle East & Africa Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 141 Middle East & Africa Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 142 Middle East & Africa Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 143 Middle East & Africa Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 144 Middle East & Africa Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
| ※参考情報 リモートプラズマソースとは、化学プロセスにおいてプラズマを生成し、そのプラズマ生成区域から一定の距離を持つ場所で化学反応を促進する装置のことです。特に半導体製造や表面処理分野で広く使用されています。リモートプラズマソースは、基板や材料表面に対して直接プラズマを触れさせずに、プラズマ生成物を供給するため、材料へのダメージを最小限に抑えることができるのが特徴です。 リモートプラズマソースにはいくつかの種類があります。一つは、マイクロ波式リモートプラズマソースです。これは、マイクロ波を利用してガスをプラズマ状態にする方式で、高いエネルギー効率を持っています。次に、RF（無線周波数）リモートプラズマソースがあります。この方式では、RF信号を使ってイオン化を行い、プラズマを生成します。これにより、より低温でのプラズマ生成が可能となり、デリケートな材料にも適用できます。また、レーザーを用いたアプローチも存在し、高精度なプラズマ制御ができます。 リモートプラズマソースの主な用途は、半導体製造プロセスにおけるエッチングや、薄膜成膜、表面改質、高機能コーティングなどです。特に、リモートプラズマアッシストエッチングは、非常に高い精度で細かなパターンを形成することができ、次世代半導体デバイスの製造には欠かせない技術です。また、薄膜形成においても、均一で高品質な膜を得るためにリモートプラズマソースが利用されます。 関連技術としては、いくつかの要素が挙げられます。まず、プラズマ生成に使用されるガスの種類です。典型的には、アルゴン、ナイトロジェン、酸素、さらにはフルオロカーボンなどが利用されます。これらのガスは、プラズマの特性や、生成されるイオンやラジカルの種類に影響を与えます。次に、プラズマのモニタリング技術も重要です。光学的手法や質量分析法を用いて、プラズマ中の成分をリアルタイムで監視することで、プロセスの最適化が図れます。 さらに、リモートプラズマソースの特性を向上させるための研究開発が進められています。例えば、プラズマの均一性を向上させるための電極設計や、プラズマの安定化のための冷却技術などが挙げられます。これにより、より高品質かつ効率的なプロセスが実現できる可能性が広がります。 リモートプラズマソースは、その特性により、フォトリソグラフィや化学気相成長（CVD）など、他の半導体製造プロセスとも組み合わせて使用されることが多いです。この相互作用によって、全体のプロセスの歩留まりや品質を向上させることができます。 最近のトレンドとしては、環境に配慮したプロセスの導入があります。特に、温室効果ガスを減らすための新しいガスやプロセス技術が探求されています。リモートプラズマソースは、その柔軟性と精密さにより、こうした新しい挑戦に応えることが期待されています。 このように、リモートプラズマソースは、半導体産業だけでなく、様々な分野で重要な役割を果たしています。その技術の進化は、今後の製造業や材料科学において大きな影響を与えるでしょう。 |
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