1 Post CMP Cleaning Market Overview
1.1 Product Definition
1.2 Post CMP Cleaning Segment by Type
1.2.1 Global Post CMP Cleaning Market Value Growth Rate Analysis by Type 2022 VS 2029
1.2.2 Acid Material
1.2.3 Alkaline Material
1.3 Post CMP Cleaning Segment by Application
1.3.1 Global Post CMP Cleaning Market Value Growth Rate Analysis by Application: 2022 VS 2029
1.3.2 Metal Impurities and Particles
1.3.3 Organic Residue
1.4 Global Market Growth Prospects
1.4.1 Global Post CMP Cleaning Production Value Estimates and Forecasts (2018-2029)
1.4.2 Global Post CMP Cleaning Production Capacity Estimates and Forecasts (2018-2029)
1.4.3 Global Post CMP Cleaning Production Estimates and Forecasts (2018-2029)
1.4.4 Global Post CMP Cleaning Market Average Price Estimates and Forecasts (2018-2029)
1.5 Assumptions and Limitations
2 Market Competition by Manufacturers
2.1 Global Post CMP Cleaning Production Market Share by Manufacturers (2018-2023)
2.2 Global Post CMP Cleaning Production Value Market Share by Manufacturers (2018-2023)
2.3 Global Key Players of Post CMP Cleaning, Industry Ranking, 2021 VS 2022 VS 2023
2.4 Global Post CMP Cleaning Market Share by Company Type (Tier 1, Tier 2 and Tier 3)
2.5 Global Post CMP Cleaning Average Price by Manufacturers (2018-2023)
2.6 Global Key Manufacturers of Post CMP Cleaning, Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of Post CMP Cleaning, Product Offered and Application
2.8 Global Key Manufacturers of Post CMP Cleaning, Date of Enter into This Industry
2.9 Post CMP Cleaning Market Competitive Situation and Trends
2.9.1 Post CMP Cleaning Market Concentration Rate
2.9.2 Global 5 and 10 Largest Post CMP Cleaning Players Market Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 Post CMP Cleaning Production by Region
3.1 Global Post CMP Cleaning Production Value Estimates and Forecasts by Region: 2018 VS 2022 VS 2029
3.2 Global Post CMP Cleaning Production Value by Region (2018-2029)
3.2.1 Global Post CMP Cleaning Production Value Market Share by Region (2018-2023)
3.2.2 Global Forecasted Production Value of Post CMP Cleaning by Region (2024-2029)
3.3 Global Post CMP Cleaning Production Estimates and Forecasts by Region: 2018 VS 2022 VS 2029
3.4 Global Post CMP Cleaning Production by Region (2018-2029)
3.4.1 Global Post CMP Cleaning Production Market Share by Region (2018-2023)
3.4.2 Global Forecasted Production of Post CMP Cleaning by Region (2024-2029)
3.5 Global Post CMP Cleaning Market Price Analysis by Region (2018-2023)
3.6 Global Post CMP Cleaning Production and Value, Year-over-Year Growth
3.6.1 North America Post CMP Cleaning Production Value Estimates and Forecasts (2018-2029)
3.6.2 Europe Post CMP Cleaning Production Value Estimates and Forecasts (2018-2029)
3.6.3 China Post CMP Cleaning Production Value Estimates and Forecasts (2018-2029)
3.6.4 Japan Post CMP Cleaning Production Value Estimates and Forecasts (2018-2029)
3.6.5 South Korea Post CMP Cleaning Production Value Estimates and Forecasts (2018-2029)
3.6.6 China Taiwan Post CMP Cleaning Production Value Estimates and Forecasts (2018-2029)
4 Post CMP Cleaning Consumption by Region
4.1 Global Post CMP Cleaning Consumption Estimates and Forecasts by Region: 2018 VS 2022 VS 2029
4.2 Global Post CMP Cleaning Consumption by Region (2018-2029)
4.2.1 Global Post CMP Cleaning Consumption by Region (2018-2023)
4.2.2 Global Post CMP Cleaning Forecasted Consumption by Region (2024-2029)
4.3 North America
4.3.1 North America Post CMP Cleaning Consumption Growth Rate by Country: 2018 VS 2022 VS 2029
4.3.2 North America Post CMP Cleaning Consumption by Country (2018-2029)
4.3.3 United States
4.3.4 Canada
4.4 Europe
4.4.1 Europe Post CMP Cleaning Consumption Growth Rate by Country: 2018 VS 2022 VS 2029
4.4.2 Europe Post CMP Cleaning Consumption by Country (2018-2029)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Russia
4.5 Asia Pacific
4.5.1 Asia Pacific Post CMP Cleaning Consumption Growth Rate by Region: 2018 VS 2022 VS 2029
4.5.2 Asia Pacific Post CMP Cleaning Consumption by Region (2018-2029)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa Post CMP Cleaning Consumption Growth Rate by Country: 2018 VS 2022 VS 2029
4.6.2 Latin America, Middle East & Africa Post CMP Cleaning Consumption by Country (2018-2029)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Turkey
5 Segment by Type
5.1 Global Post CMP Cleaning Production by Type (2018-2029)
5.1.1 Global Post CMP Cleaning Production by Type (2018-2023)
5.1.2 Global Post CMP Cleaning Production by Type (2024-2029)
5.1.3 Global Post CMP Cleaning Production Market Share by Type (2018-2029)
5.2 Global Post CMP Cleaning Production Value by Type (2018-2029)
5.2.1 Global Post CMP Cleaning Production Value by Type (2018-2023)
5.2.2 Global Post CMP Cleaning Production Value by Type (2024-2029)
5.2.3 Global Post CMP Cleaning Production Value Market Share by Type (2018-2029)
5.3 Global Post CMP Cleaning Price by Type (2018-2029)
6 Segment by Application
6.1 Global Post CMP Cleaning Production by Application (2018-2029)
6.1.1 Global Post CMP Cleaning Production by Application (2018-2023)
6.1.2 Global Post CMP Cleaning Production by Application (2024-2029)
6.1.3 Global Post CMP Cleaning Production Market Share by Application (2018-2029)
6.2 Global Post CMP Cleaning Production Value by Application (2018-2029)
6.2.1 Global Post CMP Cleaning Production Value by Application (2018-2023)
6.2.2 Global Post CMP Cleaning Production Value by Application (2024-2029)
6.2.3 Global Post CMP Cleaning Production Value Market Share by Application (2018-2029)
6.3 Global Post CMP Cleaning Price by Application (2018-2029)
7 Key Companies Profiled
7.1 Entegris
7.1.1 Entegris Post CMP Cleaning Corporation Information
7.1.2 Entegris Post CMP Cleaning Product Portfolio
7.1.3 Entegris Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.1.4 Entegris Main Business and Markets Served
7.1.5 Entegris Recent Developments/Updates
7.2 Versum Materials (Merck KGaA)
7.2.1 Versum Materials (Merck KGaA) Post CMP Cleaning Corporation Information
7.2.2 Versum Materials (Merck KGaA) Post CMP Cleaning Product Portfolio
7.2.3 Versum Materials (Merck KGaA) Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.2.4 Versum Materials (Merck KGaA) Main Business and Markets Served
7.2.5 Versum Materials (Merck KGaA) Recent Developments/Updates
7.3 Mitsubishi Chemical
7.3.1 Mitsubishi Chemical Post CMP Cleaning Corporation Information
7.3.2 Mitsubishi Chemical Post CMP Cleaning Product Portfolio
7.3.3 Mitsubishi Chemical Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.3.4 Mitsubishi Chemical Main Business and Markets Served
7.3.5 Mitsubishi Chemical Recent Developments/Updates
7.4 Fujifilm
7.4.1 Fujifilm Post CMP Cleaning Corporation Information
7.4.2 Fujifilm Post CMP Cleaning Product Portfolio
7.4.3 Fujifilm Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.4.4 Fujifilm Main Business and Markets Served
7.4.5 Fujifilm Recent Developments/Updates
7.5 DuPont
7.5.1 DuPont Post CMP Cleaning Corporation Information
7.5.2 DuPont Post CMP Cleaning Product Portfolio
7.5.3 DuPont Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.5.4 DuPont Main Business and Markets Served
7.5.5 DuPont Recent Developments/Updates
7.6 Kanto Chemical
7.6.1 Kanto Chemical Post CMP Cleaning Corporation Information
7.6.2 Kanto Chemical Post CMP Cleaning Product Portfolio
7.6.3 Kanto Chemical Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.6.4 Kanto Chemical Main Business and Markets Served
7.6.5 Kanto Chemical Recent Developments/Updates
7.7 BASF
7.7.1 BASF Post CMP Cleaning Corporation Information
7.7.2 BASF Post CMP Cleaning Product Portfolio
7.7.3 BASF Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.7.4 BASF Main Business and Markets Served
7.7.5 BASF Recent Developments/Updates
7.8 Solexir
7.8.1 Solexir Post CMP Cleaning Corporation Information
7.8.2 Solexir Post CMP Cleaning Product Portfolio
7.8.3 Solexir Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.8.4 Solexir Main Business and Markets Served
7.7.5 Solexir Recent Developments/Updates
7.9 Anjimirco Shanghai
7.9.1 Anjimirco Shanghai Post CMP Cleaning Corporation Information
7.9.2 Anjimirco Shanghai Post CMP Cleaning Product Portfolio
7.9.3 Anjimirco Shanghai Post CMP Cleaning Production, Value, Price and Gross Margin (2018-2023)
7.9.4 Anjimirco Shanghai Main Business and Markets Served
7.9.5 Anjimirco Shanghai Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 Post CMP Cleaning Industry Chain Analysis
8.2 Post CMP Cleaning Key Raw Materials
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 Post CMP Cleaning Production Mode & Process
8.4 Post CMP Cleaning Sales and Marketing
8.4.1 Post CMP Cleaning Sales Channels
8.4.2 Post CMP Cleaning Distributors
8.5 Post CMP Cleaning Customers
9 Post CMP Cleaning Market Dynamics
9.1 Post CMP Cleaning Industry Trends
9.2 Post CMP Cleaning Market Drivers
9.3 Post CMP Cleaning Market Challenges
9.4 Post CMP Cleaning Market Restraints
10 Research Finding and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Market Size Estimation
11.1.3 Market Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
※参考情報 CMP後洗浄(Chemical Mechanical Planarization Post-Cleaning)は、半導体製造プロセスの重要なステップの一つであり、特に集積回路の製造において不可欠なプロセスです。CMP自体は、基板表面を平坦化するための技術ですが、その後には細かな汚染物質や研磨剤が基板に残る可能性があります。これらの微細な残留物が次のプロセスに影響を及ぼすため、CMP後の洗浄は非常に重要です。 CMP後洗浄の定義とは、CMPプロセスを経た後のシリコンウエハやその他の基板から、研磨に伴って生じた汚染物質や残留物を取り除く工程を指します。この工程では、化学薬品や洗浄装置を用いて、表面を清浄に保つことが目的です。汚染物質が残ると、次の製造工程でのトラブルを引き起こす可能性があるため、洗浄は徹底的に行われる必要があります。 CMP後洗浄の特徴としては、まず洗浄の効率性が挙げられます。研磨剤やポリシング液の成分は非常に微細で、通常の洗浄方法では取り除ききれない場合があります。そのため、化学薬品の選定や洗浄条件の最適化が必要です。また、洗浄によって基板表面を傷つけないことも重要な要素であり、ダメージを最小限に抑えるための技術が求められます。 CMP後洗浄にはいくつかの種類があります。一般的な方法としては、液体による洗浄が最も普及しています。例えば、酸性洗浄液やアルカリ性洗浄液を用いて、化学的に汚染物質を分解または中和し、流水で洗い流す方法があります。また、超音波洗浄機を用いる方法もあり、超音波の振動を利用して汚れを浮かせる技術です。この方法は細かな隙間に入り込んだ汚れを効果的に取り除くことができます。 さらに、プラズマ洗浄やレーザー洗浄といった先進的な技術もあります。プラズマ洗浄は、高エネルギーのプラズマを用いて表面の汚染物質を揮発させる方法であり、これにより非常に高い洗浄効果を実現します。レーザー洗浄は、レーザー光を照射して汚染物質を直接分解する技術で、特定の材料に対して非常に効果的です。 CMP後洗浄の用途は多岐にわたりますが、特に半導体製造プロセスにおいて顕著です。半導体デバイスの小型化が進む中で、1ナノメートル単位での清浄性が求められます。これは、製品の性能や信頼性、歩留まりに直接的な影響を与える要素であり、非常に重要な工程とされています。 関連技術としては、洗浄装置の開発が挙げられます。最新の洗浄装置は、自動化や高効率化が進んでおり、より少ない薬剤で高い洗浄効果をあげることができるように設計されています。また、エコロジーへの配慮から、環境に優しい洗浄剤の開発も進められており、持続可能な製造プロセスを目指す動きが広がっています。 さらに、CMP後洗浄においては、ナノスケールの表面特性の制御が重要な研究テーマとなっています。表面粗さや原子間の相互作用がデバイス性能に大きく影響するため、洗浄によって得られる表面特性の最適化は、今後の半導体製造技術における重要な課題とされています。 CMP後洗浄は、単なる清掃作業ではなく、高度な技術と知識が必要なプロセスです。この工程が適切に行われることで、次のステップでのトラブルを防ぎ、最終的には高品質な半導体デバイスの製造に寄与することができます。そのため、CMP後洗浄は今後もますます重要性を増す分野であり、新たな技術革新や効率化が求められています。 |
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